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제작회사   VEECO METROLOGY GROUP
     
모델명   DEKTAK 3
     
주요사항   1)Vertical Range/Resolution : 100Å~65.5㎛/10Å
    2)Scan Length Range : 50㎛~2000㎛
    3)Scan Speed Range : low, medium, high(3~50seconds)
    4)Sample Stage : D 127㎜, X-Y translation 20㎜×80㎜,
    4)Sample Stage : R 360°
    5)Stylus : Diamond, 12.5㎛ radius
    6)Stylus Force range : 10~50㎎
    7)Maximum Sample Thickness/Weight : 20㎜/0.5㎏
    8)Variable Image Magnification : 200× 이상
     
응용분야   각종재료의 roughness, waviness 등 측정